High-precision substrate polishing system

A retainer ring according to one embodiment comprises: a core part formed in a ring shape and including a metal material; and an injection part formed around the core part through molding so as to surround the core part, wherein the core part may include: a core main body formed in a ring shape; and...

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Bibliographic Details
Main Authors KIM, HYUN-O, SHIN, INUL
Format Patent
LanguageChinese
English
Published 16.08.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A retainer ring according to one embodiment comprises: a core part formed in a ring shape and including a metal material; and an injection part formed around the core part through molding so as to surround the core part, wherein the core part may include: a core main body formed in a ring shape; and at least one through hole formed through the core main body.
Bibliography:Application Number: TW202211148177