Deposition chamber system diffuser with increased power efficiency

A diffuser includes a front-side gradient surface formed from a diffuser block, a back-side gradient surface formed from the diffuser block, and opening structures formed from the front-side gradient surface to the back-side gradient surface. Each opening structure includes a conical opening having...

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Bibliographic Details
Main Authors ZHAO, LAI, TINER, ROBIN L, FURUTA, GAKU, ATCHLEY, DAVID, CHANDRASEKARAN, GANESH BABU, CHOI, SOO YOUNG, LI, CHANG-LING
Format Patent
LanguageChinese
English
Published 01.07.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A diffuser includes a front-side gradient surface formed from a diffuser block, a back-side gradient surface formed from the diffuser block, and opening structures formed from the front-side gradient surface to the back-side gradient surface. Each opening structure includes a conical opening having a first end along the front-side gradient surface and a second end corresponding to an apex at a depth within the diffuser block, and a cylindrical opening formed from the depth to the back-side gradient surface. The opening structures are arranged in rows including a first set of rows and a second set of rows alternately positioned along a length of the diffuser block.
Bibliography:Application Number: TW202211139381