Optical module for extreme ultraviolet light source

An optical module is configured to pass an optical beam. The optical module includes: a plurality of lenses through which the optical beam passes, the plurality of lenses including at least one aspheric toroid lens; and an optical mount apparatus in which the plurality of lenses is mounted. The plur...

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Bibliographic Details
Main Authors HUERTA, ERIK FERNANDO, MCKENZIE, PAUL ALEXANDER, BANKHEAD, JADEN ROBERT, JIN, MOON-SEOB
Format Patent
LanguageChinese
English
Published 01.06.2023
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:An optical module is configured to pass an optical beam. The optical module includes: a plurality of lenses through which the optical beam passes, the plurality of lenses including at least one aspheric toroid lens; and an optical mount apparatus in which the plurality of lenses is mounted. The plurality of lenses is placed relative to a linearly focused curtain of the optical beam, the linearly focused curtain intersecting a region of interest. The optical mount apparatus is arranged in or fixed to a wall of a chamber of an extreme ultraviolet (EUV) light source such that an optical path is defined that passes through the EUV light source chamber and intersects the region of interest inside the chamber.
Bibliography:Application Number: TW202211134441