Micro gas pump

• Main Authors: MOU, HAO-JAN, HUANG, CHI-FENG, LIAO, WANG-PING, YANG, CHEN-YU, CHEN, SHIHANG, HAN, YUNG-LUNG, KAO, CHUNG-WEI
• Format: Patent
• Language: Chinese; English
• Published: 01.06.2023
• Subjects: BLASTING; HEATING; LIGHTING; MECHANICAL ENGINEERING; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; WEAPONS

A micro gas pump is disclosed and includes a tube plate, a backflow-preventing valve plate, a backflow-preventing plate, an insulation plate, a conductive foam, an actuator and a cover plate. The tube plate includes a gas inlet and a gas outlet. The backflow-preventing plate is disposed in the tube plate and includes a valve hole and a concave space. The valve hole is in the center of the concave space. The backflow-preventing plate is disposed on the backflow-preventing valve plate and includes a bulge. The bulge is protruded toward the valve hole of the backflow-preventing valve plate. The insulation plate is disposed on the backflow-preventing plate. The conductive foam is disposed on the bulge of the backflow-preventing plate. The actuator is disposed on the insulation plate and contacts with the conductive foam. The actuator includes a second pin and a piezoelectric plate. The piezoelectric plate of the actuator fits on and contacts with the conductive foam. The cover plate is disposed on the actuator an