Micro gas pump
A micro gas pump is disclosed and includes a tube plate, a backflow-preventing valve plate, a backflow-preventing plate, an insulation plate, a conductive foam, an actuator and a cover plate. The tube plate includes a gas inlet and a gas outlet. The backflow-preventing plate is disposed in the tube...
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Main Authors | , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
01.06.2023
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Subjects | |
Online Access | Get full text |
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Summary: | A micro gas pump is disclosed and includes a tube plate, a backflow-preventing valve plate, a backflow-preventing plate, an insulation plate, a conductive foam, an actuator and a cover plate. The tube plate includes a gas inlet and a gas outlet. The backflow-preventing plate is disposed in the tube plate and includes a valve hole and a concave space. The valve hole is in the center of the concave space. The backflow-preventing plate is disposed on the backflow-preventing valve plate and includes a bulge. The bulge is protruded toward the valve hole of the backflow-preventing valve plate. The insulation plate is disposed on the backflow-preventing plate. The conductive foam is disposed on the bulge of the backflow-preventing plate. The actuator is disposed on the insulation plate and contacts with the conductive foam. The actuator includes a second pin and a piezoelectric plate. The piezoelectric plate of the actuator fits on and contacts with the conductive foam. The cover plate is disposed on the actuator an |
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Bibliography: | Application Number: TW202110143525 |