Molybdenum oxide based sintered body, sputtering target, oxide thin film using the sintered body, and thin film transistors and display devices including the thin films
The present invention provides a molybdenum oxide sintered compact exhibiting excellent low reflection, chemical resistance and heat resistance, a thin film using the sintered compact, a thin film transistor comprising the thin film, and a display device.
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Main Authors | , , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
16.04.2023
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention provides a molybdenum oxide sintered compact exhibiting excellent low reflection, chemical resistance and heat resistance, a thin film using the sintered compact, a thin film transistor comprising the thin film, and a display device. |
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Bibliography: | Application Number: TW202211134819 |