Bubble measurement unit, substrate treating apparatus including the same, and bubble measurement method

The inventive concept relates to an apparatus for treating a substrate. The apparatus includes a liquid supply unit that supplies a liquid to substrate, a cover that is formed of a light transmitting material and installed on a component provided in the liquid supply unit and that provides an inspec...

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Bibliographic Details
Main Authors PARK, HYUNG-MIN, LEE, JUNG-JIN, LEE, JU-BEOM, CHO, A-RAH, PIAO, LIN-FENG, GOH, JUNG-SUK
Format Patent
LanguageChinese
English
Published 16.03.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:The inventive concept relates to an apparatus for treating a substrate. The apparatus includes a liquid supply unit that supplies a liquid to substrate, a cover that is formed of a light transmitting material and installed on a component provided in the liquid supply unit and that provides an inspection area, and an inspection unit that inspects bubbles contained in the liquid flowing in the component provided in the inspection area. The inspection unit includes a light source that applies light toward the inspection area from outside the cover, a light receiving part that is located outside the cover and that receives the light passing through the inspection area, and an inspection part that inspects the bubbles from the light received by the light receiving part.
Bibliography:Application Number: TW202211132537