Temperature control device, processing device and object manufacturing method being advantageous for improving the cooling efficiency

• Main Authors: YAMADA, SHUJI, YAMAGAMI, YUYA, FUNAYOSHI, ISSEI, AOKI, TADASHI, TO, HIROMITSU
• Format: Patent
• Language: Chinese; English
• Published: 01.01.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES

A technique is provided that is advantageous for improving cooling efficiencies by a temperature control device. The temperature control device includes: a first heat exchanger defining a first inlet port and a first outlet port; a second heat exchanger defining a second inlet port and a second outlet port; a first flow channel connecting to the first outlet port and a branch portion; a second flow channel arranged to be connected with the branch portion and a confluence portion, which is arranged to cool a first heat source; a third flow channel connecting to the branch portion and the second inlet port; a fourth flow channel arranged to be connected with the second outlet port and the confluence portion, which is arranged to cool a second heat source; a fifth flow channel connecting to the confluence portion and the first inlet port; a first heater disposed between the branch portion in the second flow channel and the first heat source; a second heater disposed between the second outlet port in the fourth f