Plasma resistant protective layer and formation method thereof
A plasma resistant protective layer and a formation method thereof are provided in the present invention. The plasma resistant protective layer is formed on a metal substrate and includes a thermal barrier coating and a plasma corrosion resistant layer. The thermal barrier coating is disposed on the...
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Main Authors | , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
01.11.2022
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Subjects | |
Online Access | Get full text |
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