Sheets for workpiece processing with excellent pickup and anti-static properties even if an active energy ray non-curable adhesive agent is used for an adhesive layer

• Main Authors: WATANABE, SHUHEI, YAMAGUCHI, SEITARO, UMEMOTO, NATSUKI
• Format: Patent
• Language: Chinese; English
• Published: 16.10.2022
• Subjects: ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; ADHESIVES; BASIC ELECTRIC ELEMENTS; CHEMISTRY; DYES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; LAYERED PRODUCTS; LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM; METALLURGY; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NATURAL RESINS; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; PAINTS; PERFORMING OPERATIONS; POLISHES; SEMICONDUCTOR DEVICES; TRANSPORTING; USE OF MATERIALS AS ADHESIVES

The present invention provides a workpiece processing sheet with excellent pickup and anti-static properties even if an active energy ray non-curable adhesive agent is used for an adhesive layer. A workpiece processing sheet is a workpiece processing sheet (1) comprising a substrate (11) and an adhesive layer (12), wherein the substrate (11) is provided with a surface layer (111) close to the adhesive layer (12), a back layer (113) away from the adhesive layer (12), and a middle layer (112) between the surface layer (111) and the back layer (113). Moreover, the adhesive layer (12) further comprises an active energy ray non-curable adhesive agent. The surface layer (111) and the back layer (113) contain an antistatic agent, and when the tensile test is conducted on the substrate (11) at a temperature of 23 ℃ and a relative humidity of 50% RH, the tensile stress at elongation of 20% and 50% is 8 MPa or more and 30 MPa or less.