Electronic substrate defect detection

This disclosure provides systems, methods, and apparatus detecting defects in a substrate. An image of the substrate is compared with a reference image to identify potential defects. Images corresponding to the potential defects are processed sequentially by a set of classifiers to generate a set of...

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Bibliographic Details
Main Authors CHECKA, NEAL, CHRISTOUDIAS, CHRISTOS MARIO
Format Patent
LanguageChinese
English
Published 01.10.2022
Subjects
CALCULATING
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
COMPUTING
COUNTING
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
MEASURING
PHYSICS
PRINTED CIRCUITS
TESTING
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Summary:This disclosure provides systems, methods, and apparatus detecting defects in a substrate. An image of the substrate is compared with a reference image to identify potential defects. Images corresponding to the potential defects are processed sequentially by a set of classifiers to generate a set of images that include a defect. The set of classifiers can be arranged to have increasing accuracy. A subset of the images corresponding to the potential defects is processed by a type classifier that can determine the type, size, and location of the defect in the images. The defects can be further processed to determine the severity of the defects based on the location of the defects on the substrate.
Bibliography:Application Number: TW202110149686