Film for forming protective film, sheet for forming protective film, composite sheet for forming protective film, and method for manufacturing device capable of suppressing peeling between a protective film and a chip caused by flux cleaning

• Main Authors: TANAKA, YUYA, SATO, SOKI
• Format: Patent
• Language: Chinese; English
• Published: 01.10.2022
• Subjects: ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; ADHESIVES; BASIC ELECTRIC ELEMENTS; CHEMISTRY; DYES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; METALLURGY; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NATURAL RESINS; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; PAINTS; POLISHES; SEMICONDUCTOR DEVICES; USE OF MATERIALS AS ADHESIVES

The present invention provides a protective film forming film which suppresses peeling between the protective film and a chip caused by flux cleaning, a protective film forming sheet and a protective film forming composite sheet having the protective film forming film, and a method for manufacturing a device, such as a semiconductor device. A protective film forming film is a protective film forming film used for forming a protective film, wherein a shear strength at an interface between the protective film and a silicon chip after immersion in a 2-aminoethanol is 33 N/5mm or more.