Semiconductor device and method for manufacturing the same

Embodiments provide a semiconductor device and a method for manufacturing the same, which enable to easily correspond and associate the position on the observed image and the position on the design data. According to one embodiment, a semiconductor device includes a circuit pattern including a plura...

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Bibliographic Details
Main Authors SHIMAMURA, YOSHIFUMI, NAKAO, KOUJI, KOSAKI, TAKUMI, MATOBA, KENICHI, TSURUDO, TAKAHIRO, TAKAHASHI, YOSHIAKI, OZAWA, TORU, MIZUTA, YOICHI
Format Patent
LanguageChinese
English
Published 16.09.2022
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Embodiments provide a semiconductor device and a method for manufacturing the same, which enable to easily correspond and associate the position on the observed image and the position on the design data. According to one embodiment, a semiconductor device includes a circuit pattern including a plurality of unit patterns that are disposed in a repeating manner in at least one direction. The semiconductor device includes a discrimination pattern provided in the circuit pattern and configured to discriminate the unit patterns from each other.
Bibliography:Application Number: TW202110118271