Lithographic apparatus, assembly, and method
There is described a lithographic apparatus including a membrane assembly and a radiation beam path, wherein the membrane assembly includes a membrane, the membrane being disposed in the radiation beam path, wherein the membrane assembly is configured to selectively move the membrane from a first po...
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
01.09.2022
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Subjects | |
Online Access | Get full text |
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Summary: | There is described a lithographic apparatus including a membrane assembly and a radiation beam path, wherein the membrane assembly includes a membrane, the membrane being disposed in the radiation beam path, wherein the membrane assembly is configured to selectively move the membrane from a first position in the radiation beam path to a second position in the radiation beam path. Also described is a membrane assembly, a method of extending the lifespan of a membrane, and the use of such apparatuses and methods in a lithographic apparatus or process. |
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Bibliography: | Application Number: TW202211102566 |