Sample piece relocating device

This sample piece relocating device (10) comprises an optical interferometry device (11), a sample piece carrying device (13) and a control device (21). The control device (21) controls the sample piece carrying device (13) on the basis of information related to a process in which a charged-particle...

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Bibliographic Details
Main Author ASAHATA, TATSUYA
Format Patent
LanguageChinese
English
Published 01.08.2022
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
GYROSCOPIC INSTRUMENTS
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING DISTANCES, LEVELS OR BEARINGS
NAVIGATION
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
SURVEYING
TESTING
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Summary:This sample piece relocating device (10) comprises an optical interferometry device (11), a sample piece carrying device (13) and a control device (21). The control device (21) controls the sample piece carrying device (13) on the basis of information related to a process in which a charged-particle beam device is used to irradiate a sample (S) with a charged-particle beam, thereby preparing a sample piece. The sample piece carrying device (13) controlled by the control device (21) separates and extracts the sample piece from the sample (S) and holds and carries the sample piece to a sample piece holder.
Bibliography:Application Number: TW202110138501