Electrical test probe

• Main Authors: CHIU, SUNG-MAO, HUA, CHEN-YU, KUO, KUN-LIN, LIN, CHAO-HSIEN, YANG, KUO-YUAN
• Format: Patent
• Language: Chinese; English
• Published: 16.06.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; METALLURGY; PHYSICS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TESTING

This invention provides an electrical test probe, which comprises a probe body and a laminated film. Said laminated film includes an interlayer, a transition layer, and a reinforcing layer. Said interlayer is disposed on a surface of said probe body, and a difference in thermal expansion coefficient between said interlayer and said probe body is 5*10-6/DEG C and below. Said transition layer is disposed on a surface of said interlayer and includes carbon and chromium. Said reinforcing layer is disposed on a surface of said transition layer and includes carbon, chromium, Cr7C3, and Cr3C2. The atom percent of carbon in said reinforcing layer is greater than the atom percent of carbon in said transition layer, and based on the total atom percent of said reinforcing layer is 100 at%, the atom percent of carbon in said reinforcing layer is 15 at% to 65 at%. Said electrical test probe has a conductivity required for electrical testing, good hardness and good anti-sticking property.