Method for transferring a membrane

The invention relates to a method for producing a device (10) comprising a membrane (14) of piezoelectric nature above at least one cavity (11), the method comprising: (a) providing a carrier substrate (1) provided with a cavity (11) opening out onto its front face (12), the cavity (11) having a lat...

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Bibliographic Details
Main Authors GHYSELEN, BRUNO, DARRAS, FRANCOIS XAVIER
Format Patent
LanguageChinese
English
Published 16.05.2022
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:The invention relates to a method for producing a device (10) comprising a membrane (14) of piezoelectric nature above at least one cavity (11), the method comprising: (a) providing a carrier substrate (1) provided with a cavity (11) opening out onto its front face (12), the cavity (11) having a lateral dimension larger than 30 [mu]m, (b) providing a donor substrate (2) provided with a buried weakened plane (20) delimiting a surface layer (22), (c) depositing, on the front face (21) of the donor substrate (2), a stiffening layer (13) made of piezoelectric material having a thickness (e) greater than 500 nm, (d) joining the carrier (1) and donor (2) substrates, (e) splitting the donor substrate (2) at the buried weakened plane (20) so as to transfer the membrane (14) comprising the surface layer (22) and the stiffening layer (13) to the carrier substrate (1).
Bibliography:Application Number: TW202110137351