Method of cleaning fluid dispenser by applying suction force and vibrating meniscus

A method of cleaning a fluid dispenser for dispensing a material during non-contact maintenance of the fluid dispenser. The fluid dispenser including a plurality of nozzles disposed on a faceplate. The method including applying a suction force onto a surface of the faceplate using a suction apparatu...

Full description

Saved in:
Bibliographic Details
Main Authors CONE, CRAIG WILLIAM, DELLINGER, ANTOINE, SHACKLETON, STEVEN C, NI, QI, KONDO, HIROYUKI
Format Patent
LanguageChinese
English
Published 01.05.2022
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:A method of cleaning a fluid dispenser for dispensing a material during non-contact maintenance of the fluid dispenser. The fluid dispenser including a plurality of nozzles disposed on a faceplate. The method including applying a suction force onto a surface of the faceplate using a suction apparatus, the suction apparatus being translated from one end of the faceplate to an opposite end of the faceplate such that a portion of nozzles from the plurality of nozzles are exposed to the suction force. The method continues by vibrating a menisci of the portion of nozzles that are exposed to the suction force to remove at least a portion of the material accumulated on the faceplate.
Bibliography:Application Number: TW202110133214