Method for operating vacuum processor

A method for operating a vacuum processing device that sequentially processes a plurality of wafers, said vacuum processing device comprising: a plurality of longitudinally positioned vacuum transport containers that are connected in adjacent pairs, a transfer robot that transports wafers to be proc...

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Bibliographic Details
Main Authors NUMATA, SHINICHIRO, NAIKI, DAICHI, SUEMITSU, YOSHIRO
Format Patent
LanguageChinese
English
Published 01.04.2022
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:A method for operating a vacuum processing device that sequentially processes a plurality of wafers, said vacuum processing device comprising: a plurality of longitudinally positioned vacuum transport containers that are connected in adjacent pairs, a transfer robot that transports wafers to be processed being positioned in an internal transport chamber; a lock compartment within which the wafer is accommodated, said lock compartment being connected to the vacuum transport container arranged frontmost among the plurality of vacuum transport containers; and a plurality of processing units connected to each of the plurality of vacuum transport containers, processing being performed on the wafer positioned inside the vacuum container, wherein a step for cleaning the interiors of each of the plurality of processing units is implemented after a prescribed period has elapsed. A plurality of sets of processing units that process individual wafers are set in advance from among the plurality of processing units before
Bibliography:Application Number: TW202110131201