Substrate transfer robot

The substrate transfer robot of the present invention includes a cable guiding part. The cable guiding part is disposed inside a housing and includes a robot cable extending from an arm, and the cable guiding part transforms by following the robot cable that moves with the ascending and the descendi...

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Bibliographic Details
Main Authors SHIMIZU, IPPEI, TAKAUJI, RYUNOSUKE
Format Patent
LanguageChinese
English
Published 16.03.2022
Subjects
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
HANDLING THIN OR FILAMENTARY MATERIAL
MANIPULATORS
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:The substrate transfer robot of the present invention includes a cable guiding part. The cable guiding part is disposed inside a housing and includes a robot cable extending from an arm, and the cable guiding part transforms by following the robot cable that moves with the ascending and the descending of the arm.
Bibliography:Application Number: TW20209138072