Member for plasma processing apparatus, method for manufacturing same, and plasma processing apparatus

This member (10, 22) for a plasma processing apparatus is characterized in having a base material (12, 23) and a heat transfer layer (13, 24) provided on one of the surfaces of the base material, the heat transfer layer (13, 24) containing a fluorine-based resin and/or a fluorine-based elastomer.

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Bibliographic Details
Main Authors KATASE, TAKUMA, ISHIKAWA, FUMIAKI, YASOSHIMA, TSUKASA, SHIONO, ICHIRO, KURATA, YUTO
Format Patent
LanguageChinese
English
Published 16.12.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PLASMA TECHNIQUE
PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS
PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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Summary:This member (10, 22) for a plasma processing apparatus is characterized in having a base material (12, 23) and a heat transfer layer (13, 24) provided on one of the surfaces of the base material, the heat transfer layer (13, 24) containing a fluorine-based resin and/or a fluorine-based elastomer.
Bibliography:Application Number: TW202110107847