Substrate transferring unit of thermal treatment device including a thermal treatment device and a plurality of gear racks

This invention relates to a substrate transferring unit of a thermal treatment device. This invention includes a thermal treatment device including a chamber in which a heater is installed and arranged and a plurality of gear racks arranged across the surface of the heater in the interior of the cha...

Full description

Saved in:
Bibliographic Details
Main Authors ROH, HYEONG-RAE, KIM, JIN-YONG, KIM, MINOL, NAKANISHI, SATORU, HA, JAE-WOOK
Format Patent
LanguageChinese
English
Published 16.12.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

More Information
Summary:This invention relates to a substrate transferring unit of a thermal treatment device. This invention includes a thermal treatment device including a chamber in which a heater is installed and arranged and a plurality of gear racks arranged across the surface of the heater in the interior of the chamber; and an omni-direction roller ball arranged at an appropriate position in order to protrude along the surfaces of the gear racks, so as to guide the conveyance and assembly or disassembly of a substrate before and after being thermally treated by the thermal treatment device.
Bibliography:Application Number: TW20209123959