Platen, assembly for holding workpiece, and electrostatic chuck

• Main Authors: SUN, DA-WEI, CHIPMAN, DAVID J, ANELLA, STEVEN M, RON, SERISKY, BLAKE, JULIAN G, CHEN, QIN
• Format: Patent
• Language: Chinese; English
• Published: 16.11.2021
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMISTRY; COMPOUNDS THEREOF; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS; SEMICONDUCTOR DEVICES

A platen having improved thermal conductivity and reduced friction, an assembly for holding a workpiece, and an electrostatic chuck are disclosed. In one embodiment, vertically aligned carbon nanotubes are grown on the top surface of the platen. The carbon nanotubes have excellent thermal conductivi...