Reticle accommodating system and method of reticle observation provided in the reticle accommodating system

• Main Authors: CHUANG, CHIA-HO, LIN, SHU-HUNG, CHIU, MINIEN, HSUEH, HSIN-MIN
• Format: Patent
• Language: Chinese; English
• Published: 16.11.2021
• Subjects: ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; BASIC ELECTRIC ELEMENTS; CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; PACKAGES; PACKAGING ELEMENTS; PACKING; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; STORING; TRANSPORTING

The reticle accommodating system according to the invention includes an inner pod and an outer pod. Said inner pod is configured to receive a reticle having a first identifiable feature, and includes an inner seat having a reticle accommodating area surrounded by a peripheral area. Said reticle accommodating area defines a first observing area corresponding to said first identifiable feature, which allows observation of said first feature. An inner lid is configured to engage with the peripheral area of the inner seat so as to define an inner space for receiving said reticle. Said outer pod is configured to accommodate the inner seat and includes an outer seat having a second observing area defined thereon. When the outer seat receives said inner pod, the second observing area is observably aligned with the first observing area, such that the first identifiable feature is confirmable through optical scanning manner. An outer lid is configured to engage with the outer seat and cover said inner pod.