Substrate holding hand and substrate transfer robot

A substrate holding hand comprising: a support plate having a circular reference capture range defined therefor; a plurality of pads disposed within the reference capture range; at least one fixed stopper disposed along an outer peripheral circle of the reference capture range; at least one movable...

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Bibliographic Details
Main Authors SHIMIZU, IPPEI, TAKAUJI, RYUNOSUKE, YAMADA, SATOSHI
Format Patent
LanguageChinese
English
Published 16.10.2021
Subjects
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
MANIPULATORS
PERFORMING OPERATIONS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:A substrate holding hand comprising: a support plate having a circular reference capture range defined therefor; a plurality of pads disposed within the reference capture range; at least one fixed stopper disposed along an outer peripheral circle of the reference capture range; at least one movable stopper having a portion corresponding to the fixed stopper in height from the support plate; and a stopper actuator configured to move the movable stopper from a withdrawn position outside the reference capture range to an advanced position closer to the fixed stopper than to the withdrawn position. The movable stopper in the advanced position and a front stopper define a circular reduced capture range, the reduced capture range having a diameter greater than a diameter of the substrate and smaller than a diameter of the capture range.
Bibliography:Application Number: TW202110107023