Non-contact deposition systems including jetting assemblies

A non-contact deposition system comprises a jetting assembly including at least one micro-valve. The micro-valve includes an orifice plate defining an orifice therethrough. An actuating beam disposed in a spaced relationship to the orifice plate. The actuating beam including a base portion and a can...

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Bibliographic Details
Main Author BUSKIRK, WILLIAM A
Format Patent
LanguageChinese
English
Published 16.09.2021
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Summary:A non-contact deposition system comprises a jetting assembly including at least one micro-valve. The micro-valve includes an orifice plate defining an orifice therethrough. An actuating beam disposed in a spaced relationship to the orifice plate. The actuating beam including a base portion and a cantilevered portion extending from the base portion towards the orifice and is movable between a closed position and an open position. A sealing structure comprising a sealing member is disposed at the overlapping portion of the cantilevered portion. A fluid manifold is coupled to the micro-valve and defines a fluid reservoir containing a pressurized fluid. When the actuating beam is in the closed position, the cantilevered portion is positioned such that the sealing structure seals the orifice so as to close the micro-valve, and in the open position, the fluid is dispensed from the orifice towards a substrate and deposited thereon.
Bibliography:Application Number: TW20209138116