Turbomolecular vacuum pump

A turbomolecular vacuum pump (1) comprises a stator (2), a rotor (3) configured to rotate in the stator (2) about an axis of rotation (I-I) and a regulation valve (13) configured to modify the inlet conductance of said vacuum pump (1) by axial displacement towards or away from a suction orifice (6)...

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Bibliographic Details
Main Authors RICHIER, GILLES, KAMBARA, HISANORI, VARENNES, NICOLAS
Format Patent
LanguageChinese
English
Published 16.08.2021
Subjects
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
NON-POSITIVE DISPLACEMENT PUMPS
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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Summary:A turbomolecular vacuum pump (1) comprises a stator (2), a rotor (3) configured to rotate in the stator (2) about an axis of rotation (I-I) and a regulation valve (13) configured to modify the inlet conductance of said vacuum pump (1) by axial displacement towards or away from a suction orifice (6) of said vacuum pump (1). The face (15) of the regulation valve (13) facing the suction orifice (6) has a hollow form.
Bibliography:Application Number: TW20209131696