Aluminum-based gallium nitride integrated circuits

Gallium nitride-based monolithic microwave integrated circuits (MMICs) can comprise aluminum-based metals. Electrical contacts for gates, sources, and drains of transistors can include aluminum-containing metallic materials. Additionally, connectors, inductors, and interconnect devices can also comp...

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Main Authors FIORENZA, JAMES G, PROUDMAN, ANDREW, GREEN, LESLIE P, STUBLER, PETER R, SRIVASTAVA, PUNEET KUMAR, MURPHY, DENIS MICHAEL, FLANDERS, KENNETH FRANCIS, PIEDRA, DANIEL
Format Patent
LanguageChinese
English
Published 01.08.2021
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Summary:Gallium nitride-based monolithic microwave integrated circuits (MMICs) can comprise aluminum-based metals. Electrical contacts for gates, sources, and drains of transistors can include aluminum-containing metallic materials. Additionally, connectors, inductors, and interconnect devices can also comprise aluminum-based metals. The gallium-based MMICs can be manufactured in complementary metal oxide semiconductor (CMOS) facilities with equipment that produces silicon-based semiconductor devices.
Bibliography:Application Number: TW20209136100