Substrate processing device, method for manufacturing semiconductor device, and sign detection program

Provided is a configuration for creating a normal model by acquiring sensor data relating to a member to be subjected to anomaly sign detection, and then monitoring the state of a device on the basis of the normal model. According to the configuration, after maintenance of the member to be subjected...

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Bibliographic Details
Main Authors KAWAGISHI, TAKAYUKI, KAJI, RYUICHI, SAKAI, MASANORI, YAMAMOTO, KAZUYOSHI, TACHI, YUTA
Format Patent
LanguageChinese
English
Published 01.08.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Provided is a configuration for creating a normal model by acquiring sensor data relating to a member to be subjected to anomaly sign detection, and then monitoring the state of a device on the basis of the normal model. According to the configuration, after maintenance of the member to be subjected to anomaly sign detection, sensor data is acquired, a normal model is re-created from the sensor data, the state of the device is monitored on the basis of the normal model, and a sign of anomaly is detected before the device makes an anomalous shutdown.
Bibliography:Application Number: TW20209131674