Laser annealing device and method for forming crystallized film

• Main Authors: GOTOH, JUN, KOSUGI, JUNICHI, TORIYAMA, SEIYA
• Format: Patent
• Language: Chinese; English
• Published: 16.04.2021
• Subjects: BASIC ELECTRIC ELEMENTS; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PERFORMING OPERATIONS; PHYSICS; SEMICONDUCTOR DEVICES; SOLDERING OR UNSOLDERING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TRANSPORTING; WELDING; WORKING BY LASER BEAM

A laser annealing device that modifies a film to be annealed into a crystallized film by irradiating the film to be annealed, which has been formed on a substrate, with continuously oscillated laser light from a light source. This laser annealing device is provided with a beam processing unit which processes the continuously oscillated laser light into focusing laser beams; and the laser beams are relatively scanned with respect to the film to be annealed in a state where a spot on which most laser beams are focusing is positioned within the film to be annealed.