Hydrofluoroether-containing solvent and method for treating substrate using hydrofluoroether-containing solvent
This solvent comprises a hydrofluoroether represented by formula (1). Rf1 and Rf2 are each independently a fluorine atom, C1-4 straight-chain perfluoroalkyl group, or C3-4 branched perfluoroalkyl group. R3 is a C1-4 straight-chain alkyl group, C3-4 branched alkyl group, C1-4 straight-chain fluoroalk...
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
16.04.2021
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Subjects | |
Online Access | Get full text |
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Summary: | This solvent comprises a hydrofluoroether represented by formula (1). Rf1 and Rf2 are each independently a fluorine atom, C1-4 straight-chain perfluoroalkyl group, or C3-4 branched perfluoroalkyl group. R3 is a C1-4 straight-chain alkyl group, C3-4 branched alkyl group, C1-4 straight-chain fluoroalkyl group, or C3-4 branched fluoroalkyl group. At least one of Rf1 and Rf2 is the C1-4 straight-chain perfluoroalkyl group or C3-4 branched perfluoroalkyl group. |
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Bibliography: | Application Number: TW20209132890 |