Hydrofluoroether-containing solvent and method for treating substrate using hydrofluoroether-containing solvent

This solvent comprises a hydrofluoroether represented by formula (1). Rf1 and Rf2 are each independently a fluorine atom, C1-4 straight-chain perfluoroalkyl group, or C3-4 branched perfluoroalkyl group. R3 is a C1-4 straight-chain alkyl group, C3-4 branched alkyl group, C1-4 straight-chain fluoroalk...

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Bibliographic Details
Main Authors HOSOI, KENJI, KASHIWABA, TAKASHI
Format Patent
LanguageChinese
English
Published 16.04.2021
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Summary:This solvent comprises a hydrofluoroether represented by formula (1). Rf1 and Rf2 are each independently a fluorine atom, C1-4 straight-chain perfluoroalkyl group, or C3-4 branched perfluoroalkyl group. R3 is a C1-4 straight-chain alkyl group, C3-4 branched alkyl group, C1-4 straight-chain fluoroalkyl group, or C3-4 branched fluoroalkyl group. At least one of Rf1 and Rf2 is the C1-4 straight-chain perfluoroalkyl group or C3-4 branched perfluoroalkyl group.
Bibliography:Application Number: TW20209132890