An alignment device for semiconductor wafer inspection

The device of the invention is mainly to resolve the angle deviation problem during the inspection of the wafer. Through the present invention, it can greatly improve the efficiency of wafer inspection.

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Bibliographic Details
Main Authors CHEN, TUNG-LIN, SUN, TAI-YEN, LO, JEN-YU, WEI, JUAO
Format Patent
LanguageChinese
English
Published 16.02.2021
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:The device of the invention is mainly to resolve the angle deviation problem during the inspection of the wafer. Through the present invention, it can greatly improve the efficiency of wafer inspection.
Bibliography:Application Number: TW20198127450