Semiconductor material having tunable permittivity and tunable thermal conductivity

• Main Authors: PELZEL, RODNEY, CLARK, ANDREW, GOTT, ALAN, NELSONEW, HAMMOND, RICHARD
• Format: Patent
• Language: Chinese; English
• Published: 01.02.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A layered structure for semiconductor application is described herein. The layered structure includes a starting material and a fully depleted porous layer formed over the starting material with high resistivity. In some embodiments, the layered structure further includes epitaxial layer grown over...