Device and method for measuring interfaces of an optical element

The invention relates to a measurement device (1), for measuring the shape of an interface (103) to be measured of an optical element (1000) comprising a plurality of interfaces, the device (1) comprising: - measurement means (4000, 6000, 7000) with at least one interferometric sensor illuminated by...

Full description

Saved in:
Bibliographic Details
Main Authors GODAVARTHI, CHARANKUMAR, COURTEVILLE, ALAIN
Format Patent
LanguageChinese
English
Published 01.02.2021
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:The invention relates to a measurement device (1), for measuring the shape of an interface (103) to be measured of an optical element (1000) comprising a plurality of interfaces, the device (1) comprising: - measurement means (4000, 6000, 7000) with at least one interferometric sensor illuminated by a low-coherence source (402, 612, 712), configured to direct a measurement beam (106, 606) towards the optical element (1000) so as to pass through said plurality of interfaces, and to selectively detect an interference signal resulting from interferences between the measurement beam (106, 606) reflected by said interface (103) to be measured and a reference beam (616, 716); - positioning means (608, 611, 708, 711) configured for relative positioning of a coherence area of the interferometric sensor at the level of the interface to be measured; - digital processing means configured to produce, based on the interference signal, an item of shape information of said interface (103) to be measured according to a field
Bibliography:Application Number: TW20200119004