Mask adapter, mask adapter attachment tool, exposure device, and device production method
This mask adapter is used in an exposure device that illuminates a mask supported on a stage and exposes a pattern formed in the mask, on to a substrate. The mask adapter is attached to the mask and comprises: a main body having a support section that supports the mask outside a region in which the...
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Main Authors | , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
16.01.2021
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Subjects | |
Online Access | Get full text |
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Summary: | This mask adapter is used in an exposure device that illuminates a mask supported on a stage and exposes a pattern formed in the mask, on to a substrate. The mask adapter is attached to the mask and comprises: a main body having a support section that supports the mask outside a region in which the pattern has been formed and a supported section supported by the stage; and a first section for detection, upon the main body and detectable by a detection unit in the exposure device. The first section for detection includes information pertaining to the mask adapter. |
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Bibliography: | Application Number: TW20209103203 |