Liquid target device
The invention provides a liquid target device so as to prevent a target liquid from flowing out of a device even when a target foil is damaged. The liquid target device (1) includes a target accommodation portion (23) as a liquid accommodation portion in which a target liquid is accommodated, a beam...
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Main Authors | , , |
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Format | Patent |
Language | Chinese English |
Published |
01.01.2021
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Subjects | |
Online Access | Get full text |
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