Liquid target device

The invention provides a liquid target device so as to prevent a target liquid from flowing out of a device even when a target foil is damaged. The liquid target device (1) includes a target accommodation portion (23) as a liquid accommodation portion in which a target liquid is accommodated, a beam...

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Bibliographic Details
Main Authors UNO, HIROYUKI, FRANCISCO, GUERRA GOMEZ, OCHI, SHIGEHARU
Format Patent
LanguageChinese
English
Published 01.01.2021
Subjects
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Summary:The invention provides a liquid target device so as to prevent a target liquid from flowing out of a device even when a target foil is damaged. The liquid target device (1) includes a target accommodation portion (23) as a liquid accommodation portion in which a target liquid is accommodated, a beam passage (11) through which a charged particle beam (B) emitted from a particle accelerator (3) passes to reach the liquid accommodation portion, a target foil (33) that separates the beam passage (11) and the liquid accommodation portion from each other, and a vacuum foil (31) that separates a vacuum region (A1) provided upstream of the beam passage (11) and the beam passage (11) from each other. The beam passage (11) is provided with a first gas chamber (R1) into which a cooling gas is supplied at a position on the vacuum foil (31) side and a second gas chamber (R2) into which a cooling gas is supplied at a position closer to the target foil (33) side than the first gas chamber (R1) and the first gas chamber (R1)
Bibliography:Application Number: TW20209109371