Liquid target device
The invention provides a liquid target device so as to prevent a target liquid from flowing out of a device even when a target foil is damaged. The liquid target device (1) includes a target accommodation portion (23) as a liquid accommodation portion in which a target liquid is accommodated, a beam...
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Main Authors | , , |
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Format | Patent |
Language | Chinese English |
Published |
01.01.2021
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Subjects | |
Online Access | Get full text |
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Summary: | The invention provides a liquid target device so as to prevent a target liquid from flowing out of a device even when a target foil is damaged. The liquid target device (1) includes a target accommodation portion (23) as a liquid accommodation portion in which a target liquid is accommodated, a beam passage (11) through which a charged particle beam (B) emitted from a particle accelerator (3) passes to reach the liquid accommodation portion, a target foil (33) that separates the beam passage (11) and the liquid accommodation portion from each other, and a vacuum foil (31) that separates a vacuum region (A1) provided upstream of the beam passage (11) and the beam passage (11) from each other. The beam passage (11) is provided with a first gas chamber (R1) into which a cooling gas is supplied at a position on the vacuum foil (31) side and a second gas chamber (R2) into which a cooling gas is supplied at a position closer to the target foil (33) side than the first gas chamber (R1) and the first gas chamber (R1) |
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Bibliography: | Application Number: TW20209109371 |