Replaceable end effector contact pads, end effectors, and maintenance methods

Replaceable contact pads of end effectors are provided. The contact pads support substrates in electronic device manufacturing. The contact pad includes a contact pad head having a contact surface configured to contact a substrate, a shaft coupled to the contact pad head, the shaft including a shaft...

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Bibliographic Details
Main Authors VOLFOVSKI, LEON, HUDGENS, JEFFREY C, MURUGARAJ, BALAMURALI, KROETZ, WHITNEY, COX, DAMON KEITH
Format Patent
LanguageChinese
English
Published 01.01.2021
Subjects
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
HAND TOOLS
MANIPULATORS
PERFORMING OPERATIONS
PORTABLE POWER-DRIVEN TOOLS
TRANSPORTING
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Summary:Replaceable contact pads of end effectors are provided. The contact pads support substrates in electronic device manufacturing. The contact pad includes a contact pad head having a contact surface configured to contact a substrate, a shaft coupled to the contact pad head, the shaft including a shaft indent formed between an underside of the contact pad head and a shaft end, and a circular securing member received around the shaft and seated in the shaft indent and configured to secure the contact pad to the end effector body. End effectors including replaceable contact pads and maintenance methods are described, as are additional aspects.
Bibliography:Application Number: TW20209106231