Shutter device, exposure device, film forming device and method of manufacturing goods enhancing strength while reducing weight of shutter blade

A shutter device opens and closes an optical path of exposure light through shutter blades. The shutter blade comprises a base component having a first surface in which exposure light is incident and a second surface at a side opposite to the first surface, and an auxiliary component combined to the...

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Bibliographic Details
Main Authors OTA, SHUNSUKE, MOURI, YOSHIHIRO, MURAKAMI, MIZUMA
Format Patent
LanguageChinese
English
Published 16.12.2020
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:A shutter device opens and closes an optical path of exposure light through shutter blades. The shutter blade comprises a base component having a first surface in which exposure light is incident and a second surface at a side opposite to the first surface, and an auxiliary component combined to the second surface. The thermal expansion rate of the auxiliary component is different from the thermal expansion rate of the base component. The shutter blade is bent by heat generated from the exposure light.
Bibliography:Application Number: TW20209113605