Transferring device and transferring system using the same and predictive maintenance method for transferring system

A transferring device includes a travelling unit, a gripper, and a vibration absorber. The gripper is connected with the travelling unit for gripping a wafer cassette. The vibration absorber is fixed on a side of the travelling unit facing the gripper, in which the vibration absorber includes a spri...

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Bibliographic Details
Main Authors WANG, SHI-MING, LEE, CHUNG-HSIEN, LIN, SHU-HUNG
Format Patent
LanguageChinese
English
Published 01.11.2020
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:A transferring device includes a travelling unit, a gripper, and a vibration absorber. The gripper is connected with the travelling unit for gripping a wafer cassette. The vibration absorber is fixed on a side of the travelling unit facing the gripper, in which the vibration absorber includes a spring.
Bibliography:Application Number: TW20198114795