Wafer conversion device configured to place a first wafer carrier and a second wafer carrier
A wafer conversion device is configured to place a first wafer carrier and a second wafer carrier. The first wafer carrier includes a plurality of first accommodating grooves, and each of the first accommodating grooves is configured to accommodate a wafer. The second wafer carrier includes a plural...
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
16.09.2020
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Subjects | |
Online Access | Get full text |
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