Conveying device for conveying at least one wafer

The invention concerns a conveying device (10) for conveying at least one wafer (36), with at least one transport body (200), wherein the transport body (200) is configured at least to carry or hold a wafer (36), and wherein the conveying device (10) is configured to move the at least one transport...

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Bibliographic Details
Main Authors VERHELST, BAS, RAATZ, HEIKE
Format Patent
LanguageChinese
English
Published 01.01.2020
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:The invention concerns a conveying device (10) for conveying at least one wafer (36), with at least one transport body (200), wherein the transport body (200) is configured at least to carry or hold a wafer (36), and wherein the conveying device (10) is configured to move the at least one transport body (200) at least two-dimensionally on a conveying surface (35).
Bibliography:Application Number: TW20198120231