Conveying device for conveying at least one wafer
The invention concerns a conveying device (10) for conveying at least one wafer (36), with at least one transport body (200), wherein the transport body (200) is configured at least to carry or hold a wafer (36), and wherein the conveying device (10) is configured to move the at least one transport...
Saved in:
Main Authors | , |
---|---|
Format | Patent |
Language | Chinese English |
Published |
01.01.2020
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | The invention concerns a conveying device (10) for conveying at least one wafer (36), with at least one transport body (200), wherein the transport body (200) is configured at least to carry or hold a wafer (36), and wherein the conveying device (10) is configured to move the at least one transport body (200) at least two-dimensionally on a conveying surface (35). |
---|---|
Bibliography: | Application Number: TW20198120231 |