Reaction device for horizontal boat production method

Provided in the present disclosure is a reaction device used for a horizontal boat production method. The device comprises a closed reaction tube and a horizontal boat container, the horizontal boat container comprising a plurality of first level horizontal boat containers, wherein at least one of t...

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Bibliographic Details
Main Authors XIAO, YA-DONG, TAN, XIAO-TIAN, LEI, REN-GUI
Format Patent
LanguageChinese
English
Published 01.01.2020
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Provided in the present disclosure is a reaction device used for a horizontal boat production method. The device comprises a closed reaction tube and a horizontal boat container, the horizontal boat container comprising a plurality of first level horizontal boat containers, wherein at least one of the first level horizontal boat containers is provided with a support device, and a second layer horizontal boat container is stacked on the support device.
Bibliography:Application Number: TW20187137041