Semiconductor synthesizing device and method

• Main Authors: XIAO, YA-DONG, TAN, XIAO-TIAN, LEI, REN-GUI
• Format: Patent
• Language: Chinese; English
• Published: 01.01.2020
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; CHEMISTRY; CRYSTAL GROWTH; METALLURGY; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

A semiconductor synthesizing device comprises a closed reaction tube, a first furnace body and a second furnace body. The reaction tube is arranged with a plurality of horizontal boat containers which include a plurality of first-layer horizontal boat containers and a second-layer horizontal boat container superposed on a bracket device provided on at least one of the first-layer horizontal boat containers. The bracket device is configured to support the second-layer horizontal boat container and provides a gap between the first-layer horizontal boat container and the second-layer horizontal boat container.