X-ray inspection device

• Main Authors: OMOTE, KAZUHIKO, HIGUCHI, AKIFUSA, UMEGAKI, SHIRO, HORADA, KATSUTAKA, MOTONO, HIROSHI, TAKAHASHI, HIDEAKI, ITO, YOSHIYASU, ASANO, SHIGEMATSU, MATSUSHIMA, NAOKI, YOSHIHARA, SEI, YAMAGUCHI, RYOTARO, OGATA, KIYOSHI
• Format: Patent
• Language: Chinese; English
• Published: 01.08.2019
• Subjects: GAMMA RAY OR X-RAY MICROSCOPES; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; IRRADIATION DEVICES; MEASURING; NUCLEAR ENGINEERING; NUCLEAR PHYSICS; PHYSICS; TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR; TESTING

An X-ray inspection device of the present invention includes a sample placing unit 11 for placing a sample as an inspection target, a sample placing unit positioning mechanism 30 for moving the sample placing unit 11, a goniometer 20 including first and second rotation members 22 and 23 rotating independently of each other, an X-ray irradiation unit 40 installed on the first rotation member 22, and a two-dimensional X-ray detector 50 installed on the second rotation member 23. The sample placing unit positioning mechanism 30 includes a [chi] rotation mechanism 35 for rotating the sample placing unit 11 and a [Phi]-axis around a [chi]-axis which is perpendicular to a [theta]s-axis and a [theta]d-axis at a measurement point P and extends in a horizontal direction.