X-ray inspection device

An X-ray inspection device of the present invention includes a sample placing unit 11 for placing a sample as an inspection target, a sample placing unit positioning mechanism 30 for moving the sample placing unit 11, a goniometer 20 including first and second rotation members 22 and 23 rotating ind...

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Bibliographic Details
Main Authors OMOTE, KAZUHIKO, HIGUCHI, AKIFUSA, UMEGAKI, SHIRO, HORADA, KATSUTAKA, MOTONO, HIROSHI, TAKAHASHI, HIDEAKI, ITO, YOSHIYASU, ASANO, SHIGEMATSU, MATSUSHIMA, NAOKI, YOSHIHARA, SEI, YAMAGUCHI, RYOTARO, OGATA, KIYOSHI
Format Patent
LanguageChinese
English
Published 01.08.2019
Subjects
GAMMA RAY OR X-RAY MICROSCOPES
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
IRRADIATION DEVICES
MEASURING
NUCLEAR ENGINEERING
NUCLEAR PHYSICS
PHYSICS
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
TESTING
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Summary:An X-ray inspection device of the present invention includes a sample placing unit 11 for placing a sample as an inspection target, a sample placing unit positioning mechanism 30 for moving the sample placing unit 11, a goniometer 20 including first and second rotation members 22 and 23 rotating independently of each other, an X-ray irradiation unit 40 installed on the first rotation member 22, and a two-dimensional X-ray detector 50 installed on the second rotation member 23. The sample placing unit positioning mechanism 30 includes a [chi] rotation mechanism 35 for rotating the sample placing unit 11 and a [Phi]-axis around a [chi]-axis which is perpendicular to a [theta]s-axis and a [theta]d-axis at a measurement point P and extends in a horizontal direction.
Bibliography:Application Number: TW20187132650