Nanoelectrode devices and methods of fabrication thereof

The present disclosure provides devices and methods for fabrication of nanoelectrode pairs which may be useful for use with tunneling labels. Devices fabricated as described may have good spacing tolerances, angular tolerances, surface uniformity, and may have reduced particulate contamination.

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Bibliographic Details
Main Authors KAWASAKI, HISAO, OLDHAM, MARK F, VAKILI, MASOUD, HONKURA, TOSHIHIKO, NORDMAN, ERIC S, GOYAL, GAURAV, WOO, SAM YA-SAN, WOUDENBERG, TIMOTHY M, MIHARA, KAZUSUKE
Format Patent
LanguageChinese
English
Published 16.07.2019
Subjects
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Summary:The present disclosure provides devices and methods for fabrication of nanoelectrode pairs which may be useful for use with tunneling labels. Devices fabricated as described may have good spacing tolerances, angular tolerances, surface uniformity, and may have reduced particulate contamination.
Bibliography:Application Number: TW20187134099