Operating method of microwave heating device and microwave annealing process using the same

• Main Authors: HU, JWU-SHENG, HUANG, KUN-PING, CHANG, CHIHN
• Format: Patent
• Language: Chinese; English
• Published: 16.04.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

An operating method of microwave heating device is provided in which a holder is disposed in a heating chamber, and a plurality of microwave transmitters is arranged outside the heating chamber. A plurality of half-wave-rectified power supplies is provided to connect the microwave transmitters, and the half-wave-rectified power supplies have capacitors respectively. A plurality of longitudinal waveguides and a plurality of transverse waveguides are installed in between the heating chamber and the microwave transmitters. The capacitance of each of the capacitors of the half-wave-rectified power supplies could be adjusted, such that the microwave waveform bandwidth emitted from the microwave transmitters is extended to produce a plurality of overlapped couplings, thereby multiplying double in amount microwave mode numbers. The half-wave-rectified power supplies supply power to the microwave transmitters, so that the microwaves are guided into the heating chamber by the longitudinal waveguides and the transverse