Projection objective with diaphragms
A projection objective (200) for imaging an object arranged in an object plane (OS) of the projection objective into an image of the object lying in an image plane (IS) of the projection objective has a multiplicity of transparent optical elements and holding devices for holding the optical elements...
Saved in:
Main Authors | , , , , |
---|---|
Format | Patent |
Language | Chinese English |
Published |
01.04.2018
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!