Projection objective with diaphragms

• Main Authors: SORG, FRANZ, WOLF, ALEXANDER, LOERING, ULRICH, HOLLAND, CHRISTIAN, DIECKMANN, NILS
• Format: Patent
• Language: Chinese; English
• Published: 01.04.2018
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

A projection objective (200) for imaging an object arranged in an object plane (OS) of the projection objective into an image of the object lying in an image plane (IS) of the projection objective has a multiplicity of transparent optical elements and holding devices for holding the optical elements at prescribable positions along an imaging beam path of the projection objective. Each of the optical elements has an optical useful region lying in the imaging beam path and an edge region lying outside the optical useful region, at least one holding element of the holding device assigned to the optical element acting at the edge region in the region of a contact zone. At least one of the optical elements (L2-1, L2-2, L3-6) is assigned a diaphragm arrangement (SA1, SA2, SA3) with a first false light diaphragm (SLS1) arranged directly upstream of the optical element, and a second false light diaphragm (SLS2) arranged directly downstream of the optical element, each of the false light diaphragms being fashioned in